RKVarma AI Universe ✦ R&D Intelligence · company 31 of 50
31 ASML
AI hardware and software R&D at ASML, from every daily edition, newest first · Curated by Dr.P.R.K.Varma
Hardware
21 October 2026
Q3 2026 update: TSMC initiative for 12-inch High-NA EUV photomasks
lithography
HardwareCompany or official announcementTRL: Theoretical
Evidence: corporate filing · TRL: theoretical (roadmap) · Sources: sec.gov · RKV-RND-2026-10-21-039
Full write-up from 21 October 2026
Latest verified R&D update. Date: 2026-10-14. ASML's Q3 2026 investor presentation (14 October 2026, SEC filing) announced a TSMC initiative for 12-inch High-NA EUV photomasks, with a pilot line targeted by 2031. Evidence: corporate filing. TRL: theoretical (roadmap). Source(s): https://www.sec.gov/Archives/edgar/data/937966/000162828026065813/a2026_10x14xpresentation.htm